Fabrication technique brings metamaterial applications a step closer: The second approach is to pattern a sacrificial substrate and then deposit repeated layers onto it. This 'pattern-first' process suffers from its own difficulties, the most important of which is that the total thickness of the final fishnet material is typically limited to tens of nanometers or less...
Zhou and colleagues were able to increase the total thickness of pattern-first fishnet films to around 300 nanometers, allowing five bilayers of film to be deposited and resulting in a strong characteristic resonance and pronounced metamaterial behavior. To achieve this, they adopted a technique called trilayer lift-off, which is commonly used in industry but seldom applied in research laboratories. It involves patterning a sacrificial layer of a photoresist resting on a layer of silicon dioxide under which lies a second photoresist layer...
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